Case new silicon carbide fab

New Silicon Carbide Wafers Fabrication Facility

Implementing a secure, uniform site-wide system for enhanced safety and emergency response.

Challenge

Designing a greenfield $1.8 billion, 1,000,000 sq. ft. fabrication facility for silicon carbide wafers required integrating complex systems, including hazardous and non-hazardous gas distribution, liquid chemical storage, air pollution control, and monitoring systems for ISO-6 and ISO-7 cleanrooms. The facility needed advanced safety measures, such as compliance with Failure Modes and Effects Analysis, hazardous materials storage codes, and integration with fire alarm and facility management systems, all while managing cost, schedule, and evolving owner requirements under the Integrated Project Delivery model.

Solution

Hallam-ICS is responsible for the design and specification of these systems:

  • Specialty gas equipment and distribution (hazardous gas cabinets, nonhazardous gas manifolds, distribution valve manifold boxes, valve manifold boxes).

  • Bulk gas distribution and interfaces to the owner-procured vendor systems (cryogenic gas yard, air separator plant, purifiers).

  • Liquid chemical equipment and distribution (storage, chemical distribution units, chemical valve manifold boxes).

  • Hazardous gas monitoring system design, including adopting the owner’s existing and pending specifications to suit the new facility.

  • Process and housekeeping vacuum systems.

  • Slurry room planning and utility provision.

  • Air pollution control including wet, stacked scrubbers for corrosive materials and catalytic thermal oxidizers for volatile organic compounds.

  • Failure Modes and Effects Analysis to support a reduction in the building code Hazard Category related to use and storage of hazardous liquids in the production areas.

  • Electrical classification of certain areas.

  • Compressed air generation and distribution.

The team supported electrical classification, code compliance, and the owner’s process safety management program, ensuring safety and efficiency. Collaborative efforts with multidisciplinary teams allowed alignment with the owner’s goals, while detailed scope management resolved evolving project requirements.

 

Results

Our team accomplished the following:

  • Delivered comprehensive, code-compliant designs for advanced process systems, including hazardous and non-hazardous gas distribution and air pollution control.
  • Optimized safety with detailed Failure Modes and Effects Analysis and seamless integration with facility management systems.
  • Successfully balanced cost, schedule, and scope in collaboration with all project stakeholders through the Integrated Project Delivery model.

Partial Project Team

Bill Neuburger No Photo
Bill Neuburger, PE
Director of Engineering